(
)
≥99.99%
0.5-20μm
10-30 m²/g
≥99.99%
2758°C
~25
≥36%
≤5ppm
≤20ppm
≤5ppm
≤15ppm
≥36%
≤1ppm
≤9ppm
≤3ppm
≤5ppm
≥99.9%
≤5ppm
≤30ppm
≤10ppm
≤20ppm
≥99.9%
≤5ppm
≤30ppm
≤10ppm
≤20ppm